FSM supplies a wide variety of high quality lithography grade Silicon Wafers to meet your exact controlled flatness requirements.
Wafer diameters available: 50mm to 300mm
Flatness measurement available: SFPD, SFQR, STIR, TTV, TIR, GTIR etc.
 
Examples of FSM Ultra Flat Silicon Wafer specifications:
Diameter: 300mm
Site Flatness: SFQR
Site Flatness Specification: <=0,05um, <=0,11um, <=0,13um,  or <=0.25um
Percent Useable Area (PUA): 100% of sites
Site Size: 26 x 8 mm
 
FSM carries stock of Ultra Flat Silicon Wafers.
Please CONTACT FSM for further information on Ultra Flat Silicon Wafers or to discuss your current requirements.