添加时间:2017-11-21 02:28:24 浏览488 来源:本站
Diameter | 150 +/- 0.5 mm | 150 +/- 0.2 mm |
Type / Dopant | P/Boron | P/Boron |
Orientation | <100> +/- 1º | <100> +/- 1º |
Grade | Test | Prime |
Resistivity | 1 - 100 Ω-cm | 10 - 20 Ω-cm |
Radial Resisivity Gradient | — | As Specified |
Oxygen | — | As Specified |
Carbon | — | As Specified |
Metals | < 5 x E10 atoms/cm2 | < 5 x E10 atoms/cm2 |
Thickness | 675 +/- 25 μm | 675 +/- 20 μm |
TTV | <= 10 μm | <= 5 μm |
GTIR | <= 2 μm | |
Bow / Warp | <= 40 μm | <= 40 μm |
STIR | — | <= 2 μm |
Flats |
1 SEMI Standard |
1 SEMI Standard |
Particle Count | <= 50 @ >= 0.2 μm | <= 30 @ >= 0.2 μm |
Polished | Single Side Polished or Double Side Polished | Single Side Polished or Double Side Polished |
Etched | Single Side Polished or Double Side Polished | Single Side Polished or Double Side Polished |