添加时间：2017-11-21 06:40:28 浏览596 来源：本站
| Diameter | 50 +/- 0.5 mm | 50 +/- 0.2 mm |
| Type / Dopant | P/Boron | P/Boron |
| Orientation | <100> +/- 1º | <100> +/- 1º |
| Grade | Test | Prime |
| Resistivity | 1 - 100 Ω-cm | 10 - 20 Ω-cm |
| Radial Resisivity Gradient | — | As Specified |
| Oxygen | — | As Specified |
| Carbon | — | As Specified |
| Metals | < 5 x E10 atoms/cm2 | < 5 x E10 atoms/cm2 |
| Thickness | 279 +/-50 μm | 279 +/- 25 μm |
| TTV | <= 10 μm | <= 10 μm |
| GTIR | ||
| Bow / Warp | <= 50 μm | <= 40 μm |
|
Flats |
1 or 2 SEMI Standard |
1 or 2 SEMI Standard |
| Particle Count | <= 20 @ >= 0.3 μm | <= 20 @ >= 0.3μm |
| Polished | Single Side Polished or Double Side Polished | Single Side Polished or Double Side Polished |
| Etched | Single Side Polished or Double Side Polished | Single Side Polished or Double Side Polished |
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