添加时间：2017-11-21 06:40:03 浏览495 来源：本站
| Diameter | 200 +/- 0.5 mm | 200 +/- 0.2 mm |
| Type / Dopant | P/Boron | P/Boron |
| Orientation | <100> +/- 1º | <100> +/- 1º |
| Grade | Test | Prime |
| Resistivity | 1 - 100 Ω-cm | 8 - 12 Ω-cm |
| Radial Resisivity Gradient | — | As Specified |
| Oxygen | — | As Specified |
| Carbon | — | As Specified |
| Metals | < 5 x E10 atoms/cm2 | < 5 x E10 atoms/cm2 |
| Thickness | 725 +/- 25 μm | 725 +/- 15 μm |
| TTV | <= 10 μm | <= 5 μm |
| GTIR | <= 2 μm | |
| Bow / Warp | <= 50 μm | <= 40 μm |
| STIR | — | <= 2 μm |
|
Flats |
SEMI Standard |
SEMI Standard |
| Particle Count | <= 30 @ >= 0.2 μm | <= 50 @ >= 0.09μm |
| Polished | Single Side Polished or Double Side Polished | Single Side Polished or Double Side Polished |
| Etched | Single Side Polished or Double Side Polished | Single Side Polished or Double Side Polished |
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