300mm-Diameter-半导体加工_晶圆片_硅晶片_光刻与薄膜覆盖-上海晶仕光官网

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300mm

添加时间：2017-11-21 06:39:57 浏览516 来源：本站

FSM carries a full line of 300mm wafers. Please see below a SEMI standard specification for prime and test grade wafers. Every customer's specification is unique and FSM can supply wafers that meet your exact specifications.
If you do not see the specification you require, please CONTACT FSM to speak with a member of our experienced and knowledgeable sales staff.

Diameter	300 +/- 0.5 mm	300 +/- 0.2 mm
Type / Dopant	P/Boron	P/Boron
Orientation	<100> +/- 1º	<100> +/- 1º
Grade	Test	Prime
Resistivity	1 - 50 Ω-cm	15 - 20 Ω-cm
Radial Resisivity Gradient	—	As Specified
Oxygen	—	As Specified
Carbon	—	As Specified
Metals	< 5 x E10 atoms/cm2	< 1 x E10 atoms/cm2
Thickness	775 +/- 25 μm	775 +/- 15 μm
TTV	<= 5 μm	<= 2 μm
Bow / Warp	<= 50 μm	<= 40 μm
STIR	—	As Specified
Flats	Standard	SEMI Standard
Particle Count	<= 50 @ >= 0.16μm	<= 50 @ >= 0.12 to 0.065 μm
Front Side	Polished	Polished
Back Side	Polished	Polished

* N type wafers available

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