Product Introduction

Our SOI (Silicon-On-Insulator) wafers combine a top device silicon layer,buried oxide (BOX) layer, and handle silicon layer, available in diameters from 2" to 8". With tightly controlled thickness tolerances(±5%), low TTV (<5μm) and bow (<20μm), plus flexible doping options(P-type, N-type, intrinsic) and resistivity from 0.001 to over 20,000 Ω·cm, our SOI wafers deliver reliable performance for CMOS,RF, MEMS, and power semiconductor applications.

Applications

- Advanced CMOS logic and low-power ICs

- RF front-end and high-frequency devices

- MEMS sensors and actuators

- Power semiconductor devices requiring dielectric isolation


Why Choose Us? 

- Precise thickness control for the three‑layer structure, with tolerance stably maintained within ±5%. 

Total Thickness Variation (TTV) is less than 5 μm and warpage below 20 μm, ensuring consistent performance for downstream photolithography processes. 

Customizable doping types and resistivity ranges to accommodate diverse process requirements. 

Full‑size coverage from 2‑inch to 8‑inch, supporting both R&D prototyping and mass production.

Parameter Specification
DEVICE LAYER -TOP MIN. MAX.
Crystal Growth Method CZ,FZ
Diameter 2" 8"
Thickness 0.05μm >300μm
Tolerance ±5%
Crystal Orientation (100),(110),(111)
Type/Dopant P/Boron,N/Phosphorus,Intrinsic
Resistivity 0.001ohm-cm >20000ohm-cm
Front Surface Polished
BURIED OXIDE -BOX LAYER MIN. MAX.
Thickness 0.1μm 3μm
Tolerance ±5%
HANDLE LAYER MIN. MAX.
Crystal Growth Method CZ,FZ
Diameter 2" 8"
Thickness 200μm 750μm
Tolerance ±5%
Crystal Orientation (100),(110),(111)
Type/Dopant P/Boron,N/Phosphorus,Intrinsic
Resistivity 0.001ohm-cm >20000ohm-cm
Back Surface Etched or Polished with Oxide
OVERALL WAFER CHARACTERISTICS MIN. MAX.
TTV <5μm
BOW <20μm